Electromechanical analysis of a piezoresistive pressure microsensor for low-pressure biomedical applications
نویسندگان
چکیده
A.L. Herrera-May, B.S. Soto-Cruz, F. López-Huerta, and L.A. Aguilera Cortés Centro de Investigación en Micro y Nanotecnologı́a, Universidad Veracruzana, Boca del Rı́o, Ver., México. Centro de Investigación en Dispositivos Semiconductores, Benemérita Universidad Autónoma de Puebla, Puebla, Pue., México. Facultad de Ciencias Fı́sico Matemáticas, Benemérita Universidad Autónoma de Puebla, Puebla, Pue., México. Departamento Ingenierı́a Mecánica, Campus Irapuato-Salamanca, Universidad de Guanajuato, Salamanca, Gto. México.
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New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
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